Oxford Vacuum Science offers a range of bench-top high vacuum and thin film deposition products for research & development. Our product range includes:
a range of bench and table-top resistive evaporators for research & development applications:
- compact, modular design for ease of configuration
- embedded PC control with user friendly interface and three or four fully automatic front panel functions
- multiple serial and USB interfaces and auxiliary power control for system expansion
- polished stainless steel, vacuum chambers with high visibility glass jar upper chambers
- wide-range turbo-pumping for low 10-6mbar range
high vacuum in less than 1 hour
- dry pumping with 3m3/hr dry scroll roughing pump
high performance resistive evaporator for metals and ceramics with innovative features:
- 400A / 2.4kW on-board power
- up to 4-way switched sources for multi-layer deposition
- high reflectivity, removeable baffles for maximum efficiency and minimum cross-contamination between sources
- flexible power rail source terminal mounting system
- water cooling to reduce out-gassing from adjacent surfaces (optional)
- rapid release source clamping system
- current, voltage and power control via front panel, RS232 or analogue interfaces
and options including:
- source temperature control
- individual source shutters
- low level individual "rate ramp" quartz crystal monitor heads
- dual technique deposition with miniature e-beam source integration
substrate mounting solutions to accommodate a wide range of sample sizes and applications:
- platen size from 70mm (2¾") to 240mm (9½") diameter
- substrate rotation for substrate platens 140mm (5½") and over
- fast entry substrate transfer platens (up to 100mm)
- backside halogen lamp substrate heating to 500°C
- water cooling
- integrated substrate shutter and quartz crystal film thickness/deposition rate monitor head
for static 70mm substrate platens
other vacuum "furniture" available from Oxford Vacuum Science:
- collar mounted quartz crystal microbalance heads for deposition rate and thickness monitoring
- collar mounted deposition shutters
- viewport deposition baffles
- fast access upper chamber port doors
- halogen chamber bakeout heaters
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To find out more about the products and services Oxford Vacuum Science provides click on one of the links,
or e-mail us at technology@oxford-vacuum.com.
Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK
tel: +44 (0) 7495 463875
OVS@oxford-vacuum.com
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bench-top high vacuum
high performance
substrate platens
deposition monitors and system sub-components