VapourPhase Ω accessories

a range of accessories for use with VapourPhase Ω thermal evaporator and miniature eb sources when used in conjunction with VapourPhase Ω:

removeable radiation baffles

polished sheet stainless steel inserts for improved efficiency and ease of cleaning

baffle fixed source clamp switch parts from both deposition and radiated heat
easily removeable for ease of cleaning
polished finish reflects radiated heat back on to source to improve source efficiency
three layers of baffling between adjacent sources
supplied as standard with VapourPhase Ω or can be supplied separately as an accessory

sequentially switched shutters close coupled to each source

close to source to provide good protection against cross-contamination between sources
scolloped edges (optional) allow rate to be monitored whilst shutter closed and prior to deposition
manually operated from front panel of VapourPhase Ω thermal evaporator power supply
compatible with miniature eb source

low level quartz crystal monitor heads to individually monitor output from each evaporation source

low angle allows heads to "see" under scolloped source shutters
mounted via VapourPhase Ω feedthrough flange instrumentation port, including water-cooling feeddthroughs
adjustable head angle allows monitor heads to be used with miniature eb source mounted below power rails

To find out more about Oxford Vacuum Science's deposition sources and accessories e-mail us at technology@oxford-vacuum.com.

Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK

tel: +44 (0) 7495 463875

OVS@oxford-vacuum.com